diff --git a/CMakeLists.txt b/CMakeLists.txt
index 2c4a5fd03..aafe424c6 100644
--- a/CMakeLists.txt
+++ b/CMakeLists.txt
@@ -28,6 +28,8 @@ if(NOT PY_LIBRARY_NAME)
   set(PY_LIBRARY_NAME "fastdeploy_main")
 endif()
 include(ExternalProject)
+set(THIRD_PARTY_PATH ${CMAKE_CURRENT_BINARY_DIR}/third_libs)
+
 add_subdirectory(${CSRCS_DIR_NAME}/fastdeploy)
 include(${PROJECT_SOURCE_DIR}/cmake/utils.cmake)
 
@@ -37,6 +39,10 @@ if(NOT MSVC)
   set(CMAKE_CXX_FLAGS "-Wno-format")
 endif(NOT MSVC)
 
+if(UNIX)
+  include(${PROJECT_SOURCE_DIR}/cmake/patchelf.cmake)
+endif()
+
 if(ANDROID)
   # To reduce the volume of the library
   set(CMAKE_C_FLAGS "${CMAKE_C_FLAGS} -g0 -Os -ffunction-sections -fdata-sections")
@@ -168,7 +174,6 @@ set(DEPEND_LIBS "")
 file(READ "${PROJECT_SOURCE_DIR}/VERSION_NUMBER" FASTDEPLOY_VERSION)
 string(STRIP "${FASTDEPLOY_VERSION}" FASTDEPLOY_VERSION)
 
-set(THIRD_PARTY_PATH ${CMAKE_CURRENT_BINARY_DIR}/third_libs)
 
 # Add eigen lib
 include_directories(${PROJECT_SOURCE_DIR}/third_party/eigen)
@@ -278,10 +283,13 @@ if(ENABLE_TRT_BACKEND)
     execute_process(COMMAND ${Python_EXECUTABLE} ${PROJECT_SOURCE_DIR}/scripts/copy_directory.py ${TRT_DIRECTORY}/lib ${CMAKE_CURRENT_BINARY_DIR}/third_libs/install/tensorrt/lib)
     if(UNIX)
       execute_process(COMMAND sh -c "ls *.so*" WORKING_DIRECTORY ${CMAKE_CURRENT_BINARY_DIR}/third_libs/install/tensorrt/lib
-    	          COMMAND sh -c "xargs patchelf --set-rpath '$ORIGIN'" WORKING_DIRECTORY ${CMAKE_CURRENT_BINARY_DIR}/third_libs/install/tensorrt/lib
+	      COMMAND sh -c "xargs ${PATCHELF_EXE} --set-rpath '$ORIGIN'" WORKING_DIRECTORY ${CMAKE_CURRENT_BINARY_DIR}/third_libs/install/tensorrt/lib
     	          RESULT_VARIABLE result
                       OUTPUT_VARIABLE curr_out
                       ERROR_VARIABLE  curr_out)
+      if(ret EQUAL "1")
+	message(FATAL_ERROR "Failed to patchelf tensorrt libraries.")
+      endif()
       message(STATUS "result:${result} out:${curr_out}")
     endif()
   endif()
diff --git a/cmake/paddle_inference.cmake b/cmake/paddle_inference.cmake
index 0bed5a05a..43c726a23 100644
--- a/cmake/paddle_inference.cmake
+++ b/cmake/paddle_inference.cmake
@@ -89,7 +89,7 @@ ExternalProject_Add(
   BUILD_BYPRODUCTS ${PADDLEINFERENCE_COMPILE_LIB})
 
 if(UNIX)
-  add_custom_target(patchelf_paddle_inference ALL COMMAND  bash -c "python ${PROJECT_SOURCE_DIR}/scripts/patch_paddle_inference.py ${PADDLEINFERENCE_INSTALL_DIR}/paddle/lib/libpaddle_inference.so" DEPENDS ${LIBRARY_NAME})
+  add_custom_target(patchelf_paddle_inference ALL COMMAND  bash -c "PATCHELF_EXE=${PATCHELF_EXE} python ${PROJECT_SOURCE_DIR}/scripts/patch_paddle_inference.py ${PADDLEINFERENCE_INSTALL_DIR}/paddle/lib/libpaddle_inference.so" DEPENDS ${LIBRARY_NAME})
 endif()
 
 add_library(external_paddle_inference STATIC IMPORTED GLOBAL)
diff --git a/cmake/patchelf.cmake b/cmake/patchelf.cmake
new file mode 100644
index 000000000..3e8441fc3
--- /dev/null
+++ b/cmake/patchelf.cmake
@@ -0,0 +1,26 @@
+# Copyright (c) 2022 PaddlePaddle Authors. All Rights Reserved.
+#
+# Licensed under the Apache License, Version 2.0 (the "License");
+# you may not use this file except in compliance with the License.
+# You may obtain a copy of the License at
+#
+# http://www.apache.org/licenses/LICENSE-2.0
+#
+# Unless required by applicable law or agreed to in writing, software
+# distributed under the License is distributed on an "AS IS" BASIS,
+# WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied.
+# See the License for the specific language governing permissions and
+# limitations under the License.
+
+if(UNIX)
+  set(PATCHELF_EXE "patchelf")
+  if(CMAKE_HOST_SYSTEM_PROCESSOR MATCHES "aarch64")
+    set(PATCHELF_URL https://bj.bcebos.com/fastdeploy/third_libs/patchelf-0.15.0-aarch64.tar.gz)
+    download_and_decompress(${PATCHELF_URL} ${CMAKE_CURRENT_BINARY_DIR}/patchelf-0.15.0-aarch64.tar.gz ${THIRD_PARTY_PATH}/patchelf)
+    set(PATCHELF_EXE ${THIRD_PARTY_PATH}/patchelf/bin/patchelf)
+  else()
+    set(PATCHELF_URL https://bj.bcebos.com/fastdeploy/third_libs/patchelf-0.15.0-x86_64.tar.gz)
+    download_and_decompress(${PATCHELF_URL} ${CMAKE_CURRENT_BINARY_DIR}/patchelf-0.15.0-x86_64.tar.gz ${THIRD_PARTY_PATH}/patchelf)
+    set(PATCHELF_EXE ${THIRD_PARTY_PATH}/patchelf/bin/patchelf)
+  endif()
+endif()
diff --git a/scripts/patch_paddle_inference.py b/scripts/patch_paddle_inference.py
index ad01a975d..9a141d0d8 100644
--- a/scripts/patch_paddle_inference.py
+++ b/scripts/patch_paddle_inference.py
@@ -17,15 +17,24 @@ import sys
 import shutil
 import subprocess
 import platform
+import sys
+
 
 def process_paddle_inference(paddle_inference_so_file):
     rpaths = [
-      "$ORIGIN",
-      "$ORIGIN/../../third_party/install/mkldnn/lib/",
-      "$ORIGIN/../../third_party/install/mklml/lib/",
-      "$ORIGIN/../../../tensorrt/lib"
+        "$ORIGIN", "$ORIGIN/../../third_party/install/mkldnn/lib/",
+        "$ORIGIN/../../third_party/install/mklml/lib/",
+        "$ORIGIN/../../../tensorrt/lib"
     ]
 
-    command = "patchelf --set-rpath '{}' {}".format(":".join(rpaths), paddle_inference_so_file)
+    patchelf_exe = os.getenv("PATCHELF_EXE", "patchelf")
+    command = "{} --set-rpath '{}' {}".format(patchelf_exe, ":".join(rpaths),
+                                              paddle_inference_so_file)
     if platform.machine() != 'sw_64' and platform.machine() != 'mips64':
-        assert os.system(command) == 0, "patchelf {} failed, the command: {}".format(paddle_inference_so_file, command)
+        assert os.system(
+            command) == 0, "patchelf {} failed, the command: {}".format(
+                paddle_inference_so_file, command)
+
+
+if __name__ == "__main__":
+    process_paddle_inference(sys.argv[1])