diff --git a/fastdeploy/cache_manager/cache_transfer_manager.py b/fastdeploy/cache_manager/cache_transfer_manager.py
index f39232cd2..124988fce 100644
--- a/fastdeploy/cache_manager/cache_transfer_manager.py
+++ b/fastdeploy/cache_manager/cache_transfer_manager.py
@@ -30,14 +30,25 @@ from fastdeploy import envs
 from fastdeploy.cache_manager.cache_data import CacheStatus
 from fastdeploy.config import SpeculativeConfig
 from fastdeploy.inter_communicator import EngineCacheQueue, IPCSignal, KVCacheStatus
-from fastdeploy.model_executor.ops.gpu import (
-    cuda_host_alloc,
-    cuda_host_free,
-    set_data_ipc,
-    share_external_data,
-    swap_cache_all_layers,
-    unset_data_ipc,
-)
+from fastdeploy.platforms import current_platform
+
+if current_platform.is_cuda():
+    from fastdeploy.model_executor.ops.gpu import (
+        cuda_host_alloc,
+        cuda_host_free,
+        set_data_ipc,
+        share_external_data,
+        swap_cache_all_layers,
+        unset_data_ipc,
+    )
+elif current_platform.is_xpu():
+    from fastdeploy.model_executor.ops.xpu import (
+        cuda_host_alloc,
+        cuda_host_free,
+        set_data_ipc,
+        share_external_data,
+        swap_cache_all_layers,
+    )
 from fastdeploy.utils import get_logger
 
 
@@ -114,7 +125,6 @@ class CacheTransferManager:
         """
         初始化CacheTransferManager
         """
-
         device = args.device_id
         rank = args.rank
         self.gpu_cache_kvs = {}
@@ -173,8 +183,9 @@ class CacheTransferManager:
             suffix=args.engine_pid,
             create=False,
         )
-
-        threading.Thread(target=self.clear_or_update_caches, args=[args], daemon=True).start()
+        # TODO XPU support RL
+        if not current_platform.is_xpu():
+            threading.Thread(target=self.clear_or_update_caches, args=[args], daemon=True).start()
 
     def _init_gpu_cache(self, args):
 
@@ -185,7 +196,10 @@ class CacheTransferManager:
             logger.info(f"[rank {self.rank}/{self.n_ranks}] OK! Stop waiting.")
 
         logger.info(f"[rank {self.rank}/{self.n_ranks}] Initializing kv cache for all layers.")
-        paddle.set_device(f"gpu:{self.device}")
+        if current_platform.is_cuda():
+            paddle.set_device(f"gpu:{self.device}")
+        elif current_platform.is_xpu():
+            paddle.set_device(f"xpu:{self.device}")
         for i in range(args.num_layers + self.num_extra_layers):
             num_gpu_blocks = args.num_gpu_blocks if i < args.num_layers else self.num_extra_layer_gpu_blocks
             cache_shape = [num_gpu_blocks, args.kv_num_head, args.block_size, args.head_dim]
@@ -202,8 +216,12 @@ class CacheTransferManager:
                 logger.info(f"[rank {self.rank}/{self.n_ranks}] ..attaching kv cache for layer {i}: {cache_shape}")
                 key_cache = paddle.empty(shape=[], dtype=args.cache_dtype)
                 val_cache = paddle.empty(shape=[], dtype=args.cache_dtype)
-                key_cache = share_external_data(key_cache, key_name, cache_shape)
-                val_cache = share_external_data(val_cache, val_name, cache_shape)
+                if current_platform.is_xpu():
+                    key_cache = share_external_data(key_cache, key_name, cache_shape, True)
+                    val_cache = share_external_data(val_cache, val_name, cache_shape, True)
+                else:
+                    key_cache = share_external_data(key_cache, key_name, cache_shape)
+                    val_cache = share_external_data(val_cache, val_name, cache_shape)
 
             self.gpu_cache_kvs[key_name] = key_cache
             self.gpu_cache_kvs[val_name] = val_cache
@@ -217,9 +235,10 @@ class CacheTransferManager:
         cache_kv_size_byte = sum([tmp.numel() * 1 for key, tmp in self.gpu_cache_kvs.items()])
         logger.info(f"[rank {self.rank}/{self.n_ranks}] device :{self.device}")
         logger.info(f"[rank {self.rank}/{self.n_ranks}] cache_kv_size_byte : {cache_kv_size_byte}")
-        logger.info(
-            f"[rank {self.rank}/{self.n_ranks}] done init cache (full) gmem alloc : {paddle.device.cuda.memory_allocated()}"
-        )
+        if current_platform.is_cuda():
+            logger.info(
+                f"[rank {self.rank}/{self.n_ranks}] done init cache (full) gmem alloc : {paddle.device.cuda.memory_allocated()}"
+            )
 
     def _init_cpu_cache(self, args):
         if args.num_cpu_blocks == 0:
@@ -473,7 +492,10 @@ class CacheTransferManager:
                             time.sleep(0.1)
 
                     # clear gpu caches
-                    paddle.set_device(f"gpu:{self.device}")
+                    if current_platform.is_cuda():
+                        paddle.set_device(f"gpu:{self.device}")
+                    elif current_platform.is_xpu():
+                        paddle.set_device(f"xpu:{self.device}")
                     for name, tensor in self.gpu_cache_kvs.items():
                         unset_data_ipc(tensor, name, True, False)
                     self.gpu_cache_kvs.clear()
@@ -543,5 +565,8 @@ if __name__ == "__main__":
     args = parse_args()
     rank_id = args.rank + args.local_data_parallel_id * args.mp_num
     logger = get_logger("cache_transfer_manager", f"cache_transfer_manager_rank{rank_id}.log")
-    paddle.set_device(f"gpu:{args.device_id}")
+    if current_platform.is_cuda():
+        paddle.set_device(f"gpu:{args.device_id}")
+    elif current_platform.is_xpu():
+        paddle.set_device(f"xpu:{args.device_id}")
     main()
diff --git a/fastdeploy/engine/args_utils.py b/fastdeploy/engine/args_utils.py
index 123b33cfd..d24923bd2 100644
--- a/fastdeploy/engine/args_utils.py
+++ b/fastdeploy/engine/args_utils.py
@@ -410,7 +410,7 @@ class EngineArgs:
             self.enable_prefix_caching = False
         if self.speculative_config is not None:
             self.enable_prefix_caching = False
-        if not current_platform.is_cuda():
+        if not current_platform.is_cuda() and not current_platform.is_xpu():
             self.enable_prefix_caching = False
         # if self.dynamic_load_weight:
         #     self.enable_prefix_caching = False
diff --git a/fastdeploy/worker/xpu_model_runner.py b/fastdeploy/worker/xpu_model_runner.py
index f04680498..985e2a911 100644
--- a/fastdeploy/worker/xpu_model_runner.py
+++ b/fastdeploy/worker/xpu_model_runner.py
@@ -26,6 +26,7 @@ from fastdeploy import envs
 from fastdeploy.config import FDConfig
 from fastdeploy.engine.request import Request, RequestType
 from fastdeploy.input.ernie4_5_vl_processor import DataProcessor
+from fastdeploy.inter_communicator import IPCSignal
 from fastdeploy.model_executor.forward_meta import ForwardMeta, XPUForwardMeta
 from fastdeploy.model_executor.graph_optimization.utils import (
     profile_run_guard,
@@ -45,6 +46,8 @@ from fastdeploy.model_executor.ops.xpu import (
     get_infer_param,
     get_padding_offset,
     recover_decode_task,
+    set_data_ipc,
+    share_external_data,
     update_inputs_v1,
 )
 from fastdeploy.utils import get_logger
@@ -335,11 +338,19 @@ def step_paddle(
 class XPUModelRunner(ModelRunnerBase):
     """ """
 
-    def __init__(self, fd_config: FDConfig, device: str, rank: int, local_rank: int):
+    def __init__(
+        self,
+        fd_config: FDConfig,
+        device: str,  # logic device
+        device_id: int,  # physical device id
+        rank: int,
+        local_rank: int,
+    ):
         super().__init__(fd_config=fd_config, device=device)
         self.enable_mm = self.model_config.enable_mm
         self.rank = rank
         self.local_rank = local_rank
+        self.device_id = device_id
         self.enable_early_stop = self.fd_config.early_stop_config.enable_early_stop
 
         # VL model config:
@@ -895,11 +906,11 @@ class XPUModelRunner(ModelRunnerBase):
         for attn_backend in self.attn_backends:
             attn_backend.init_attention_metadata(self.forward_meta)
 
-    def initialize_kv_cache(self) -> None:
+    def initialize_kv_cache(self, profile: bool = False) -> None:
         """
         Initialize kv cache
         """
-        cache_kvs = {}
+        # cache_kvs = {}
         max_block_num = self.num_gpu_blocks
 
         # Get kv cache dtype
@@ -914,21 +925,56 @@ class XPUModelRunner(ModelRunnerBase):
 
         # Get kv cache shape
         kv_cache_shape = self.attn_backends[0].get_kv_cache_shape(max_num_blocks=max_block_num)
+        local_rank = self.local_rank % self.parallel_config.tensor_parallel_size
+
+        cache_ready_signal_data = np.zeros(shape=[self.parallel_config.tensor_parallel_size], dtype=np.int32)
+        cache_ready_signal = IPCSignal(
+            name="cache_ready_signal",
+            array=cache_ready_signal_data,
+            dtype=np.int32,
+            suffix=self.parallel_config.engine_worker_queue_port,
+            create=False,
+        )
+
+        # Check if gpu runner needs to create kv cache
+        # 1. During profiling, it creates its own kv cache.
+        # 2. GPU runner creates kv cache tensor unless p/d disaggregation is enabled.
+        create_cache_tensor = profile or self.scheduler_config.splitwise_role == "mixed"
+        if not create_cache_tensor:
+            logger.info(f"Waiting for cache managers to create kv cache.. {cache_ready_signal.value}")
+            while cache_ready_signal.value[local_rank] != 1:
+                time.sleep(1)
+            logger.info(f"OK! Stop waiting. {cache_ready_signal.value}")
+
+        logger.info(f"Initializing kv cache for all layers. {cache_ready_signal.value}")
+        cache_kvs_list = []
 
         for i in range(self.model_config.num_hidden_layers):
-            cache_kvs[f"key_caches_{i}"] = paddle.full(
-                shape=kv_cache_shape,
-                fill_value=0,
-                dtype=cache_type,
-            )
-            cache_kvs[f"value_caches_{i}"] = paddle.full(
-                shape=kv_cache_shape,
-                fill_value=0,
-                dtype=cache_type,
-            )
-        self.share_inputs["caches"] = list(cache_kvs.values())
-        for value in cache_kvs.values():
-            del value
+            key_cache_name = f"key_caches_{i}_rank{local_rank}.device{self.device_id}"
+            val_cache_name = f"value_caches_{i}_rank{local_rank}.device{self.device_id}"
+
+            if create_cache_tensor:
+                logger.info(f"..creating kv cache for layer {i}: {kv_cache_shape}")
+                key_cache = paddle.full(shape=kv_cache_shape, fill_value=0, dtype=cache_type)
+                set_data_ipc(key_cache, key_cache_name)
+                val_cache = paddle.full(shape=kv_cache_shape, fill_value=0, dtype=cache_type)
+                set_data_ipc(val_cache, val_cache_name)
+                cache_kvs_list.extend([key_cache, val_cache])
+
+            else:
+                logger.info(f"..attaching kv cache for layer {i}: {kv_cache_shape}")
+                key_cache = paddle.empty(shape=[], dtype=cache_type)
+                key_cache = share_external_data(key_cache, key_cache_name, kv_cache_shape, False)
+                val_cache = paddle.empty(shape=[], dtype=cache_type)
+                val_cache = share_external_data(val_cache, val_cache_name, kv_cache_shape, False)
+                cache_kvs_list.extend([key_cache, val_cache])
+
+        self.share_inputs["caches"] = cache_kvs_list
+
+        if not profile and create_cache_tensor:
+            cache_ready_signal.value[local_rank] = 1
+            logger.info(f"✅ kv cache is ready! {cache_ready_signal.value}")
+
         paddle.device.xpu.empty_cache()
 
     def initialize_attn_backend(self) -> None:
@@ -1138,18 +1184,12 @@ class XPUModelRunner(ModelRunnerBase):
 
         return None
 
-    def prepare_profile(self) -> None:
-        """Prepare the profile run by setting the block number and initializing the KV cache."""
-        paddle.device.xpu.empty_cache()
-        self.num_gpu_blocks = self.parallel_config.total_block_num
-        self.initialize_kv_cache()
-
     @profile_run_guard(True)
     def profile_run(self) -> None:
         """Execute a forward pass with dummy inputs to profile the memory usage of the model"""
 
         self.num_gpu_blocks = self.parallel_config.total_block_num
-        self.initialize_kv_cache()
+        self.initialize_kv_cache(profile=True)
 
         self._dummy_run(
             num_tokens=int(self.scheduler_config.max_num_batched_tokens),
diff --git a/fastdeploy/worker/xpu_worker.py b/fastdeploy/worker/xpu_worker.py
index ef7450ec7..6ffbb4f26 100644
--- a/fastdeploy/worker/xpu_worker.py
+++ b/fastdeploy/worker/xpu_worker.py
@@ -23,6 +23,7 @@ from paddle import nn
 from fastdeploy import envs
 from fastdeploy.config import FDConfig
 from fastdeploy.engine.request import Request
+from fastdeploy.platforms import current_platform
 from fastdeploy.utils import get_logger, set_random_seed
 from fastdeploy.worker.output import ModelRunnerOutput
 from fastdeploy.worker.worker_base import WorkerBase
@@ -49,10 +50,11 @@ class XpuWorker(WorkerBase):
 
     def init_device(self):
         """Initialize device and Construct model runner"""
+        self.max_chips_per_node = 16 if current_platform.is_iluvatar() else 8
         if paddle.is_compiled_with_xpu():
             # Set environment variable
             self.device_ids = self.parallel_config.device_ids.split(",")
-            self.device = f"xpu:{self.local_rank}"
+            self.device = f"xpu:{self.local_rank % self.max_chips_per_node}"
             paddle.device.set_device(self.device)
             paddle.set_default_dtype(self.parallel_config.dtype)
 
@@ -67,6 +69,7 @@ class XpuWorker(WorkerBase):
             fd_config=self.fd_config,
             device=self.device,
             rank=self.rank,
+            device_id=int(self.device_ids[self.local_rank % self.max_chips_per_node]),
             local_rank=self.local_rank,
         )
 
@@ -109,7 +112,6 @@ class XpuWorker(WorkerBase):
                     used_memory: {used_memory}, free_memory: {free_memory}"
         )
 
-        self.model_runner.prepare_profile()
         if self.parallel_config.use_ep:
             logger.warning("EP mode does not support profile run.")
         else: